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Ultra-low temperature ultra-low vibration ultra-high vacuum system


Ultra-low temperature ultra-low vibration ultra-high vacuum system

The system is an important part of the National Natural Science Foundation's major scientific instrument development project “High-resolution in-situ real-time friction energy dissipation measurement system”, which has been successfully delivered. The system integrates the GM cryogenic refrigerator of Pride ultra-low temperature company, the ultra-low vibration cryostat of GM low-temperature refrigerator as the cold source, the cryostat of liquid helium/liquid nitrogen as the cold source, and the GM cryogenic refrigerator as the cold source. Recycling and purification liquefaction system, ultra-high vacuum linear sample transfer system and ultra-high vacuum circular sample transfer system and other high-end equipment, and have high performance indicators, such as temperature below 3K, vibration below ±5nm, vacuum is better than 1 x 10-10 mbar.




temperature range


Vibration index


Vacuum degree

Better than 1 x 10-10 mbar





Comprehensive cavity performance index

Sample minimum operating temperature


Sample operating temperature range

3K~ room temperature continuously adjustable

Sample vertical amplitude


Sample horizontal amplitude


Integrated cavity vacuum

Better than 5x 10-7 mbar


Vacuum sample performance index

Vacuum Degree of Ultra-high Vacuum Partial

Ultimate vacuum value is better than 1 x 10-10 mbar

Vacuum Degree of High vacuum Partial

Ultimate vacuum value is better than 1 x 10-8 mbar